Various sputtering targets
USTRON started manufacturing sputtering targets in 2008.
We manufacture a variety of metals, oxides and alloys. We also accept orders for bonding these materials.
Metal materials:Si、Nb、Ti、Cr、Ta、Al・・・
Oxides:SiO2、Ta2O5、Al2O3、ITO・・・
Alloy materials:Cu+Ag、Ni+Cr、Ti+Cl・・・
We can fabricate both flat and cylindrical targets up to 4 m long.
Nb
Si
Ta
Si
Si-Al rotary target
Ti cylindrical target
SiO2
Cr
Metal materials
Product name | Element symbol | Density | Melting point | Risk and Safety Indication |
---|---|---|---|---|
Aluminum | Al | 2.702 | 660 | CAS No.7429-90-5 |
Chromium | Cr | 7.19 | 1857 | CAS No.7440-47-3 |
Copper | Cu | 8.96 | 1084.6 | CAS No.7440-50-8 | R48 / 20 / 22 |
Iron | Fe | 7.874 | 1535 | CAS No.7439-89-6 | R48 / 20 / 22 |
Hafnium | Hf | 13.31 | 2227 | CAS No.7440-58-6 | S3 / 14 |
Molybdenum | Mo | 10.22 | 2617 | CAS No.7439-98-7 |
Niobium | Nb | 8.57 | 2460 | CAS No.7440-3-1 |
Momocrystaline silicon | Si | 2.33 | 1410 | CAS No.7440-21-3 |
Tantalum | Ta | 16.65 | 2990 | CAS No.7440-25-7 |
Titanium | Ti | 4.5 | 1660 | CAS No.7440-32-6 | S3 / 14 |
Zirconim | Zr | 6.51 | 1852 | CAS No.7440-67-7 |
Alloy materials
Product name | Element symbol | Risk and Safety Indication |
---|---|---|
Aluminum+Copper | Al+Cu | CAS No.7429-90-5 / 7440-50-8 | R48 / 20 / 22 |
Aluminum+Silicon | Al+Si | CAS No.7429-90-5 / 7440-21-3 |
Chromium+Silicon | Cr+Si | CAS No.7440-47-3 / 7440-21-3 |
Copper+Nickel | Cu+Ni | CAS No.7440-50-8 / 7440-02-0 | R48 / 20 / 22 |
Copper+Zinc | Cu+Zn | CAS No.7440-50-8 / 7440-66-6 | R48 / 20 / 22 |
Nickel+Chromium | Ni+Cr | CAS No.7440-02-0 / 7440-47-3 |
Titanium+Aluminum | Ti+Al | CAS No.7440-32-6 / 7440-90-5 |
Titanium+Chromium | Ti+Cr | CAS No.7440-32-6 / 7440-47-3 |
Titanium+Copper | Ti+Cu | CAS No.7440-32-6 / 7440-50-8 |
Titanium+Nickel | Ti+Ni | CAS No.7440-32-6 / 7440-02-0 |
Titanium+Silicon | Ti+Si | CAS No.7440-32-6 / 7440-21-3 |
Zirconim+Aluminum | Zr+Al | CAS No.7440-67-7 / 7440-90-5 |
Zirconim+Hafnium | Zr+Hf | CAS No.7440-67-7 / 7440-58-6 |
Oxides
Product name | Element symbol | Density | Melting point | Risk and Safety Indication |
---|---|---|---|---|
Aluminum oxide | Al2O3 | 3.98 | 2020 | CAS No.1344-28-1 |
Hafnium oxide | HfO2 | 9.68 | 2812 | CAS No.12055-23-1 |
Columbium pentoxide | Nb2O5 | 4.47 | 1530 | CAS No.1313-96-8 |
Silicon deoxide | SiO2 | 2.1 | 1713 | CAS No.7631-86-9 |
Stannic oxide | SnO2 | 6.95 | 1630 | CAS No.18282-10-5 |
Tantalum pentoxide | Ta2O5 | 8.74 | 1800 | CAS No.1314-61-0 |
Titanium oxide | TiOX | 4.29 | 1850 | |
Zirconim deoxide | ZrO2 | 5.49 | 2715 | CAS No.1314-23-4 |